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5851E: Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals
The Brooks Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures
流量范围：10slpm-100slpm 精度：1% FS 压力：100bar 1500psig 温度：65℃ 150F 信号：0-5V
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